Installation is optimized for the deposition of the metal on the volatile matter (for example, organic semiconductors).
Since metal evaporates from the hot cathode, in order to prevent overheating of the volatile materials samples, evaporator is placed far away from the sample, and the sample is located on a massive copper block that is cooled by water. There is a possibility to install Peltier element between the sample and the copper block for cooling the sample below 0°C). Control of the film thickness during the deposition process is carried out by a quartz thickness gauge Sigma AQM-160.
- Temperature of the sample -30 – +20 ºC.
- Evaporation materials: Al, In, Ag, Au.
