Installing for the pulsed laser deposition of HTSC heterostructures with high-speed filtering module.
The unit is designed for the deposition of epitaxial HTS films and heterostructures.
- Deposition in classical axial geometry.
- Elimination of microdroplets and particulates from the laser plasma flow using velocity filtering.
- The ability to change the target in situ and layer deposition of various materials films.
- Maximum sample size — 15×15 mm