Full name:
Heidelberg mPG 101 laser lithography equipment.
Specifications:
| Wavelength of the laser LED | 375 nm. |
| LED Power | 70 watts. |
| Minimum size of structures | 0.9 microns (2.5 microns), depending on the writing lens |
| Alignment accuracy | no worse than 200 nm. |
| Maximum illumination area | 125×125 mm2 |