Components:
- tubular furnace KJ-T-1200;
- digital gas flow monitoring station.
Purpose:
Production of various samples.
Description:
The equipment is a tubular furnace with a hole diameter of 60 mm with a controller for temperatures up to 1200 C, a vacuum pumping system and regulation of gas supply and a digital control station. It is fully functional and actively used.
The installation is configurable, in particular it is used for:
- annealing of samples of layered materials in vacuum;
- application of a parylene coating by CVD.
The gas flow control unit is used in a plasma chemical etching unit.
